杩戝勾鏉ラ殢鐫€鐞冨樊鏍℃鍣ㄦ€ц兘鐨勬彁楂樺拰澶氭帰澶寸殑搴旂敤锛屾壂鎻忛€忓皠锛圫TEM锛夋垚鍍忔妧鏈緱鍒颁簡蹇€熺殑鍙戝睍銆備緥濡傚湪鏈€鏂扮殑SCORR鐞冨樊鏍℃鍣ㄧ殑甯姪涓嬶紝鐢ㄦ埛涓嶄絾鍙互鍦�300 kV宸ヤ綔鐢靛帇涓嬪疄鐜�60 pm鐨勫垎杈ㄧ巼锛岃€屼笖鍦�60 kV宸ヤ綔鐢靛帇涓嬩篃鍙互瀹炵幇96 pm鐨勫垎杈ㄧ巼銆傝€屼笖閫氳繃閰嶅BF锛孌F2锛孌F4锛孒AADF鎺㈠ご锛屽彲鍚屾椂鑾峰緱璐ㄥ帤琛害鍍忥紝琛嶅皠琛害鍍忓強鍘熷瓙搴忔暟琛害鍍忋€傚叾涓敱HAADF鎺㈠ご鑾峰緱鐨勫師瀛愬簭鏁拌‖搴﹀儚鐢变簬鍏锋湁鍥惧儚鍙洿鎺ヨВ璇伙紝鑳藉鍦ㄤ竴瀹氱▼搴︿笂鍖哄垎涓嶅悓鍘熷瓙搴忔暟鐨勫師瀛愮殑鐗圭偣锛岃€屽簲鐢ㄦ渶涓哄箍娉涖€�

1.STEM鎶€鏈湪搴旂敤涓亣鍒扮殑涓や釜鐡堕

STEM鎶€鏈櫧鐒惰幏寰椾簡蹇€熺殑鍙戝睍锛屼絾鏄湪瀹為檯搴旂敤涓瓨鍦ㄤ袱涓獊鍑虹殑鐡堕锛屽嵆杞婚噸鍏冪礌鍘熷瓙鐨勫悓鏃舵垚鍍忛棶棰樺拰瀵圭數瀛愭潫鏁忔劅鏉愭枡鐨勬垚鍍忛棶棰橈紝浠庤€屽埗绾︿簡STEM鎶€鏈湪鏉愭枡鐮旂┒涓殑搴旂敤銆�

a)杞婚噸鍏冪礌鍘熷瓙鐨勫悓鏃舵垚鍍忛棶棰�

閾佺數閾佺闄剁摲鍜岄珮娓╄秴瀵间綋鐨勬€ц兘涓庡叾鍐呴儴杞诲厓绱犲師瀛愮殑绌轰綅鍜岀己闄锋湁鍏筹紝鍥犳鑳藉惁鍊熷姪閫忓皠鐢甸暅鐩存帴瑙傚療鍒拌交鍘熷瓙鏄潗鏂欑爺绌朵腑鐨勫叧閿竴鐜€傜幇鏈夌殑STEM鎶€鏈紝铏界劧鍒╃敤HAADF鎺㈠ご鑾峰緱鐨勫師瀛愬簭鏁拌‖搴﹀儚鍙敤浜庡尯鍒嗛噸鍘熷瓙锛屼絾鏄浜嶤锛孨锛孫绛夎交鍘熷瓙鍗存澂姘磋溅钖紝鍥犱负鍦ㄥぇ閮ㄥ垎鎯呭喌涓嬩細鐢变簬淇″彿杩囦綆鑰屾棤娉曗€滅湅鍒扳€濊繖浜涜交鍏冪礌鐨勫師瀛愩€傝櫧鐒朵娇鐢⊿TEM涓殑ABF鍍忓彲浠モ€滅湅鍒扳€濊繖浜涜交鍘熷瓙锛屼絾鏄張甯︽潵浜咥BF鍥惧儚鏃犳硶鐩存帴瑙ｈ锛岄渶瑕侀€氳繃妯℃嫙璁＄畻纭锛屼互鍙婂鏍峰搧鍘氬害瑕佹眰楂橈紝鍥惧儚淇″櫔姣斾笉浣崇瓑闂銆�

b)瀵圭數瀛愭潫鏁忔劅鏉愭枡鐨勬垚鍍忛棶棰�

涓€浜涢噸瑕佺殑鍔熻兘鏉愭枡瀵圭數瀛愭潫闈炲父鏁忔劅銆備緥濡傚垎瀛愮瓫鍜孧OF鏉愭枡閫氬父鍙兘鎵垮彈鍑犵櫨鍒板嚑鍗冧釜鐢靛瓙鐨勮緪鐓э紝琛ㄧ幇涓衡€滄潵涓嶅強鑱氬ソ鐒﹀氨鐓у潖浜嗏€濄€傞€氬父鍙互閫氳繃闄嶄綆鐢靛瓙鏉熸潫娴侊紙鍓傞噺锛夌殑鏂规硶锛屾潵瀹炵幇STEM鎴愬儚锛屼絾鏄搷浣滈毦搴﹀ぇ锛屽悓鏃舵墍鑾峰緱鐨勫浘鍍忎俊鍣瘮浣庯紝闅句互鍒嗚鲸鍏抽敭缁嗚妭銆�

2.iDPC鎶€鏈強鍏剁壒鐐�

涓鸿В鍐充笂杩伴棶棰橈紝璧涢粯椋炴彁鍑哄苟鍙戝睍浜唅DPC杩欎竴鍏ㄦ柊鐨凷TEM鎴愬儚妯″紡锛屽€熷姪澶氬垎鍖烘帰澶撮噰闆嗘暟鎹拰浼樺寲绠楁硶瀹炵幇浜嗗鏉愭枡涓交閲嶅厓绱犲師瀛愮殑鍚屾椂鎴愬儚[1]锛屽苟澶у箙搴︽敼鍠勪簡瀵圭數瀛愭潫鏁忔劅鏉愭枡鐨勬垚鍍忚川閲廩2]锛屽湪鍘熷瓙灏哄害瀹炵幇浜嗗鍏抽敭缁嗚妭鐨勫垎杈ㄣ€�

鍦�1970骞翠唬锛岀爺绌朵汉鍛樺凡缁忓彂鐜颁細鑱氭潫琛嶅皠鑺辨牱鐨勮川蹇冨湪鏍峰搧鐨勪笉鍚屽尯鍩熶細鍙戠敓绉诲姩锛岀Щ鍔ㄧ殑鏂瑰悜鍜屽箙搴︿笌鏍峰搧鐨勬姇褰卞唴鍔跨殑鍒嗗竷鍏锋湁绾挎€х浉鍏虫€с€傛嵁姝ょ瀛﹀鍜屽伐绋嬪笀鍒╃敤鍒嗗尯鎺㈠ご锛屽湪STEM妯″紡涓嬪鏍峰搧杩涜鎵弿锛岃幏寰椾簡鑺辨牱璐ㄥ績鍦╔锛孻涓や釜鏂瑰悜鐨勭Щ鍔ㄦ暟鎹紝杩涗竴姝ュ鍏惰繘琛屼簩缁寸Н鍒嗗氨鍙互鑾峰緱杩戜技鎻忚堪鏍峰搧鎶曞奖鍐呭娍鍒嗗竷鐨勫浘鍍忋€傚洜涓哄唴鍔跨殑鍒嗗竷鍙堜笌鏍峰搧鍐呴儴鍘熷瓙鐨勭绫诲拰鍏蜂綋浣嶇疆鐩存帴鐩稿叧[3]锛屽洜姝ゅ氨鍙互閫氳繃杩欑鏂规硶鈥滅湅鍒扳€濅笉鍚屽師瀛愮殑鍏蜂綋浣嶇疆銆傝繖涓€鎴愬儚鎶€鏈氨鏄痠DPC鎶€鏈紙鍥� 1锛夈€�

鍥�1 iDPC鎴愬儚鎶€鏈�

瀹為獙鏁版嵁鍜岀悊璁哄垎鏋愶紙鍥� 2锛夎〃鏄巌DPC鍥惧儚鍏锋湁浠ヤ笅涓ゅぇ鏄捐憲鐗圭偣锛�

a)鍥惧儚鏄撹В璇伙細鍏锋湁绫讳技浜嶩AADF鍍忕殑鍘熷瓙搴忔暟琛害锛屽浘鍍忚‖搴﹀彈娆犵劍閲忓拰鏍峰搧鍘氬害褰卞搷杈冨皬銆�

b)淇″櫔姣旈珮锛氱瓑鏁堜簬鍒╃敤浜嗘墍鏈夌數瀛愬弬涓庢垚鍍忥紝鍗充娇鍦ㄦ瀬浣庡墏閲忎笅涔熷彲淇濊瘉杈冮珮鐨勪俊鍣瘮銆�

鍥�2 BF鍜宨DPC鎴愬儚鎶€鏈涓嶅悓鍏冪礌鍘熷瓙鐨勬垚鍍忚‖搴4]

3.iDPC搴旂敤瀹炰緥

鍥�3 Ba2NaNb5O15鐨凥AADF鍍忓拰iDPC鍍廩4]

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鍥�4 GaN [211]鐨凥AADF鍍忓拰iDPC鍍廩1]

鍥�5 Ni/YSZ鐣岄潰鐨刬DPC鍍廩5]

鍊熷姪Themis Z鐞冨樊鐭閫忓皠鐢甸暅锛岀敤鎴蜂笉浣嗗彲浠ュ湪STEM鐨凥AADF妯″紡涓嬪垎杈ㄩ棿璺濅负63 pm鐨凣a鍘熷瓙锛岃€屼笖鍊熷姪iDPC鎶€鏈繕鍙互鐪嬪埌Ga鍘熷瓙鍙充晶鍚屾牱闂磋窛涓�63 pm鐨勪袱涓狾鍘熷瓙锛堝浘 4锛夈€備粠鑰屽疄鐜颁簡楂樺垎杈ㄤ笅杞婚噸鍘熷瓙鐨勭洿鎺ュ垎杈ㄣ€傚浘 5涓篿DPC鍦ㄧ爺绌禢i/YSZ鐣岄潰涓婄殑搴旂敤锛屽皢鐣岄潰澶凬i锛孼r鍜孫鍘熷瓙鐨勫垎甯冩儏鍐垫竻鏅板湴灞曠幇浜嗗嚭鏉ャ€�

鍥�6 鐭冲ⅷ鐑疕AADF鍍忓強iDPC鍍廰

鐭冲ⅷ鐑殑楂樺垎杈⊿TEM鍍忔槸妫€楠岀數闀滀綆鐢靛帇鎬ц兘鐨勯噸瑕佸弬鑰冦€傚€熷姪Themis Z鐞冨樊鏍℃鐢甸暅锛岀敤鎴峰彲浠ュ湪浣庣數鍘婼TEM鐨凙DF妯″紡涓嬭幏寰楅珮璐ㄩ噺鐨勭煶澧ㄧ儻楂樺垎杈ㄥ儚锛屽鍥� 5鎵€绀恒€傚悓鏃跺€熷姪iDPC鎶€鏈紝鍙互杩涗竴姝ユ樉钁楁彁鍗囧浘鍍忕殑淇″櫔姣旓紝浣垮緱鍥惧儚璐ㄩ噺鏇翠笂涓€灞傛ゼ銆傛槸鐮旂┒浜岀淮鏉愭枡鐨勫緱鍔涘伐鍏枫€�

鍥�7 鍒嗗瓙绛沍SM-5鐨勪綆鍓傞噺ADF鍍忓強iDPC鍍廱

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4.鎬荤粨

iDPC鎴愬儚鎶€鏈殑鍑虹幇锛岃В鍐充簡鐩墠STEM鎴愬儚妯″紡鐨勪袱澶х摱棰堬紝璇ユ妧鏈疄鐜颁簡杞婚噸鍏冪礌鍘熷瓙鐨勯珮璐ㄩ噺鍚屾椂鎴愬儚鍜屽鐢靛瓙鏉熸晱鎰熸潗鏂欑殑楂樿川閲忔垚鍍忋€傚悓鏃秈DPC鍥惧儚鍏锋湁鍥惧儚鏄撹В璇伙紝淇″櫔姣旈珮鐨勪紭鐐癸紝鏄爺绌惰交鍏冪礌鍗犱綅锛屼簩缁存潗鏂欙紝鍒嗗瓙绛涚瓑鏉愭枡鐨勬湁鍔涘伐鍏枫€俰DPC鎴愬儚鎶€鏈幇宸叉棤缂濋泦鎴愬湪Themis Z鐞冨樊鐭閫忓皠鐢甸暅鍙奣alos鍦哄彂灏勯€忓皠鐢甸暅涓婏紝瀹炵幇浜唅DPC鍥惧儚鐨勫湪绾垮疄鏃堕噰闆嗗拰鏄剧ず銆傚浗鍐呴鎵圭敤鎴峰凡鍊熷姪iDPC鎴愬儚鎶€鏈幏寰椾簡楂樿川閲忓浘鍍忥紙鍥� 5鍜屽浘 6锛夈€�

5.鍙傝€冩枃鐚�

1.Y眉celen, E., I. Lazi?, and E.G.T. Bosch,Phase contrast scanning transmission electron microscopy imaging of light and heavy atoms at the limit of contrast and resolution.Scientific Reports, 2018.8(1): p. 2676.

2.Ma, Y., et al.,The influence of straight pore blockage on the selectivity of methanol to aromatics in nanosized Zn/ZSM-5: an atomic Cs-corrected STEM analysis study.RSC Advances, 2016.6(78): p. 74797-74801.

3.Lazi?, I., E.G.T. Bosch, and S. Lazar,Phase contrast STEM for thin samples: Integrated differential phase contrast.Ultramicroscopy, 2016.160: p. 265-280.

4.Lazi?, I. and E.G.T. Bosch,Chapter Three - Analytical Review of Direct Stem Imaging Techniques for Thin Samples, inAdvances in Imaging and Electron Physics, P.W. Hawkes, Editor. 2017, Elsevier. p. 75-184.

5.Nahor, H., et al.,Discerning interface atomistic structure by phase contrast in STEM: The equilibrated Ni-YSZ interface.Acta Materialia, 2018.154: p. 71-78.

a.Image obtained on Thermo ScientificTMThemis 60-300, Courtesy of Dr. Zhibo Liu, Institute of Metal Research, CAS

b.Image obtained on Thermo ScientificTMThemis 30-300, Courtesy of Dr. Xiao Chen, Department of Chemical Engineering, Tsinghua University

涓婇儴鍒嗘鏂囧畬

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